Optimization of junctions formed by solid phase epitaxial regrowth for sub-70nm CMOS

Lindsay, RichardRichardLindsayPawlak, BartekBartekPawlakStolk, PeterPeterStolkMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6540Optimization of junctions formed by solid phase epitaxial regrowth for sub-70nm CMOSProceedings paper