CMOS compatible anodization process for low cost high density capacitors

Detalle, MikaelMikaelDetalleRakowski, MichalMichalRakowskiPotoms, GoedeleGoedelePotomsMercha, AbdelkarimAbdelkarimMerchade Potter de ten Broeck, MurielMurielde Potter de ten BroeckPhommahaxay, AlainAlainPhommahaxaySabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanSoussan, PhilippePhilippeSoussan2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17015CMOS compatible anodization process for low cost high density capacitorsProceedings paper