Control of laser induced interface traps with in-line corona charge metrology

Everaert, Jean-LucJean-LucEveraertRosseel, ErikErikRosseelOrtolland, ClaudeClaudeOrtollandAoulaiche, MarcMarcAoulaicheHoffmann, Thomas Y.Thomas Y.HoffmannPavelka, TiborTiborPavelkaDon, EricEricDon2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13709Control of laser induced interface traps with in-line corona charge metrologyProceedings paper