SEM based overlay measurement between via patterns and buried M1 patterns using high voltage SEM

Hasumi, KazuhisaKazuhisaHasumiInoue, OsamuOsamuInoueOkagawa, YutakaYutakaOkagawaShao, ChuanyuChuanyuShaoLeray, PhilippePhilippeLerayHalder, SandipSandipHalderLorusso, GianGianLorussoJehoul, ChristianeChristianeJehoul2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28465SEM based overlay measurement between via patterns and buried M1 patterns using high voltage SEMProceedings paper10.1117/12.2257848