Fabrication and thermal tolerant all-silicon wavelength filtering devices

Dwivedi, Sarvagya PaavanSarvagya PaavanDwivediD'heer, HerbertHerbertD'heerBogaerts, WimWimBogaerts2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23787Fabrication and thermal tolerant all-silicon wavelength filtering devicesProceedings paper