Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time

Verdonck, PatrickPatrickVerdonckDe Roest, DavidDavidDe RoestKaneko, ShinyaShinyaKanekoCaluwaerts, RudyRudyCaluwaertsTsuji, NaotoNaotoTsujiMatsushita, KiyohiroKiyohiroMatsushitaKemeling, NathanNathanKemelingTravaly, YoussefYoussefTravalySprey, HesselHesselSpreySchaekers, MarcMarcSchaekersBeyer, GeraldGeraldBeyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13170Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure timeJournal article