Deposition of nanodiamond-graphite-like films with a microwave electron-cyclotron resonance process

Gushchin, OlegOlegGushchinOrlov, SergeySergeyOrlovBaklanov, MikhaïlMikhaïlBaklanovYanovich, SergeySergeyYanovichYafarov, RavilRavilYafarovIgnatov, RavelRavelIgnatovZaitsev, NikolayNikolayZaitsev2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19025Deposition of nanodiamond-graphite-like films with a microwave electron-cyclotron resonance processMeeting abstract