Large-scale and ultra-thin boron-doped nanocrystalline diamond membranes: fabrication, electrical and mechanical characterization

Pobedinskas, PauliusPauliusPobedinskasMohr, M.M.MohrDrijkoningen, SienSienDrijkoningenBehroudj, A.A.BehroudjFecht, H.-J.H.-J.FechtHaenen, KenKenHaenen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27144Large-scale and ultra-thin boron-doped nanocrystalline diamond membranes: fabrication, electrical and mechanical characterizationOral presentation