Franquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoPirkl, AlexanderAlexanderPirklKayser, SvenSvenKayserMoellers, RudolfRudolfMoellersConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32986A holistic approach of SIMS analysis for advanced semiconductor structuresProceedings paper