El Otell, ZiadZiadEl OtellSingh, ArjunArjunSinghChan, BTBTChanGronheid, RoelRoelGronheidde Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25252Plasma patterning of SIS modified DSA line space patterns into siliconMeeting abstract