Petry, JasmineJasminePetryRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstConard, ThierryThierryConardChen, JerryJerryChenCosnier, VincentVincentCosnier2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8001Effect of N2 annealing on AlZrO oxideJournal article