Silicon-quartz microcapillary opto-fluidic platform obtained by CMOS-compatible Die to Wafer 200 mm dual bonding process

Fiorentino, GiuseppeGiuseppeFiorentinoJones, BenBenJonesRoth, SophieSophieRothGrac, EdithEdithGracJayapala, MuraliMuraliJayapalaBex, PieterPieterBexDuarte de Almeida, DanielDanielDuarte de AlmeidaHumbert, AurelieAurelieHumbertSeveri, SimoneSimoneSeveri2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30707Silicon-quartz microcapillary opto-fluidic platform obtained by CMOS-compatible Die to Wafer 200 mm dual bonding processProceedings paperhttps://doi.org/10.3390/proceedings2131018