Eslava Fernandez, SalvadorSalvadorEslava FernandezUrrita, JoneJoneUrritaBusawon, AbheeshAbheeshBusawonBaklanov, MikhaïlMikhaïlBaklanovIacopi, FrancescaFrancescaIacopiAldea, StelianaStelianaAldeaMaex, KarenKarenMaexMartens, JohanJohanMartensKirschhock, ChristineChristineKirschhock2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13706Zeolite-inspired low-k dielectrics: overcoming limitations of zeolite filmsJournal article