Tokei, ZsoltZsoltTokeiWaeterloos, JoostJoostWaeterloosIacopi, FrancescaFrancescaIacopiCaluwaerts, RudyRudyCaluwaertsStruyf, HerbertHerbertStruyfVan Aelst, JokeJokeVan AelstMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6886Barrier process development for damascene integration of porous SiLK resin filmsProceedings paper