Claes, MartineMartineClaesParaschiv, VasileVasileParaschivDictus, DriesDriesDictusConard, ThierryThierryConardBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeerschDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10232Wet etch characteristics of Hf-silicatesMeeting abstract