Accuracy assessment between on product and on-optical-target overlay metrology with optical microscopy, SEM and STEM

Abranovitz, YanivYanivAbranovitzLevin, G.G.LevinSarig, L.L.SarigLevi, S.S.LeviAdan, O.O.AdanTilson, A.A.TilsonArjavac, J.J.ArjavacStrauss, M.M.StraussKwakman, L.L.KwakmanLeray, PhilippePhilippeLerayHalder, SandipSandipHalder2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34584Accuracy assessment between on product and on-optical-target overlay metrology with optical microscopy, SEM and STEMProceedings paperhttps://doi.org/10.1117/12.2563606