Alternative integration of ultra low-k dielectrics by template replacement approach

Zhang, LipingLipingZhangde Marneffe, Jean-FrancoisJean-Francoisde MarneffeHeylen, NancyNancyHeylenMurdoch, GayleGayleMurdochTokei, ZsoltZsoltTokeiBoemmels, JuergenJuergenBoemmelsDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26238Alternative integration of ultra low-k dielectrics by template replacement approachProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325596