Electrical and structural properties of oxygen-precipitation induced extended defects in silicon

Claeys, CorCorClaeysSimoen, EddyEddySimoenVanhellemont, JanJanVanhellemont2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1123Electrical and structural properties of oxygen-precipitation induced extended defects in siliconProceedings paper