Integration of the ZoneBOND™ temporary bonding material in backside processing for 3D applications

Jourdain, AnneAnneJourdainPhommahaxay, AlainAlainPhommahaxayVerbinnen, GreetGreetVerbinnenSuhard, SamuelSamuelSuhardMiller, AndyAndyMillerSwinnen, BartBartSwinnenBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-202021-10-202012-09https://imec-publications.be/handle/20.500.12860/20878Integration of the ZoneBOND™ temporary bonding material in backside processing for 3D applicationsProceedings paper