Investigation of stress in shallow trench isolation using UV micro-raman spectroscopy

Dombrowski, KaiKaiDombrowskiDietrich, B.B.DietrichDe Wolf, IngridIngridDe WolfRooyackers, RitaRitaRooyackersBadenes, GonçalGonçalBadenes2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5260Investigation of stress in shallow trench isolation using UV micro-raman spectroscopyJournal article