MOVPE AlGaN/AlN/GaN HEMT with in-situ passivation

Germain, MarianneMarianneGermainRuythooren, WouterWouterRuythoorenLeys, MaartenMaartenLeysDerluyn, JoffJoffDerluynDas, JohanJohanDasXiao, DongpingDongpingXiaoWang, WenfeiWenfeiWangVandersmissen, RafRafVandersmissenDegroote, StefanStefanDegrooteBoeykens, StevenStevenBoeykensSchreurs, DominiqueDominiqueSchreursBorghs, GustaafGustaafBorghs2021-10-152021-10-152004-10https://imec-publications.be/handle/20.500.12860/8952MOVPE AlGaN/AlN/GaN HEMT with in-situ passivationProceedings paper