Measurement and statistical analysis of single trap current-voltage characteristics in ultrathin SiON

Degraeve, RobinRobinDegraeveGovoreanu, BogdanBogdanGovoreanuKaczer, BenBenKaczerVan Houdt, JanJanVan HoudtGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/10357Measurement and statistical analysis of single trap current-voltage characteristics in ultrathin SiONProceedings paper