Hydrogen enhanced thermal donor formation in oxygen enriched high resistive float-zone silicon

Job, R.R.JobUlyashin, A. G.A. G.UlyashinFahrner, W. R.W. R.FahrnerSimoen, EddyEddySimoenClaeys, CorCorClaeysTonelli, G.G.Tonelli2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6441Hydrogen enhanced thermal donor formation in oxygen enriched high resistive float-zone siliconJournal article