Size effect on Raman measured stress and strain induced phonon shifts in ultra-thin silicon film

Pashartis, C.C.Pashartisvan Setten, M. J.M. J.van SettenPourtois, G.G.Pourtois2025-01-262025-01-262025-JAN 10003-6951WOS:001399062700005https://imec-publications.be/handle/20.500.12860/45121Size effect on Raman measured stress and strain induced phonon shifts in ultra-thin silicon filmJournal article10.1063/5.0240392WOS:001399062700005SPECTROSCOPY