Increasing Functionality of Wafer's Backside: Analysis of Si and WS2 Backside Power-Switch

Mirabelli, GioeleGioeleMirabelliChen, RongmeiRongmeiChenAhmed, ZubairZubairAhmedChehab, BilalBilalChehabZografos, OdysseasOdysseasZografosHiblot, GaspardGaspardHiblotWeckx, PieterPieterWeckxHellings, GeertGeertHellingsRyckaert, JulienJulienRyckaert2023-11-232023-06-302023-11-2320230018-9383WOS:001006078400001https://imec-publications.be/handle/20.500.12860/42110Increasing Functionality of Wafer's Backside: Analysis of Si and WS2 Backside Power-SwitchJournal article10.1109/TED.2023.3279807WOS:001006078400001