De Simone, DaniloDaniloDe SimoneGoethals, MiekeMiekeGoethalsVan Roey, FriedaFriedaVan RoeyTao, ZhengZhengTaoFoubert, PhilippePhilippeFoubertHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonse2021-10-222021-10-2220140914-9244https://imec-publications.be/handle/20.500.12860/23723Progresses and challenges of EUV lithography materialsJournal articlehttps://www.jstage.jst.go.jp/article/photopolymer/27/5/27_601/_article