Vandervorst, WilfriedWilfriedVandervorstMeuris, MarcMarcMeurisDe Wolf, P.P.De WolfAlvarez, D.D.AlvarezHantschel, ThomasThomasHantschelTrenkler, T.T.TrenklerFouchier, M.M.FouchierDuhayon, NatasjaNatasjaDuhayonPolspoel, WouterWouterPolspoelMody, JayJayMody2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14708Probing electrical properties of semiconductor structures on the nm-scaleOral presentation