Deep level assessment of n-type Si/SiO2 metal-oxide-semiconductor capacitors with embedded Ge quantum dots

Aouassa, MansourMansourAouassaVrielinck, HenkHenkVrielinckSimoen, EddyEddySimoen2021-10-252021-10-2520182162-8769https://imec-publications.be/handle/20.500.12860/30140Deep level assessment of n-type Si/SiO2 metal-oxide-semiconductor capacitors with embedded Ge quantum dotsJournal articlehttp://jss.ecsdl.org/content/7/2/P24.full