Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics

Vanstreels, KrisKrisVanstreelsWu, ChenChenWuVerdonck, PatrickPatrickVerdonckBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-2020120003-6951https://imec-publications.be/handle/20.500.12860/21753Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectricsJournal article