Pieters, PhilipPhilipPietersBorzi, RaffaellaRaffaellaBorzivan Spengen, MerlijnMerlijnvan SpengenDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9430Reliability and failure analysis of microsystemsProceedings paper