Younkin, ToddToddYounkinGronheid, RoelRoelGronheidRincon Delgadillo, PaulinaPaulinaRincon DelgadilloChan, BTBTChanVandenbroeck, NadiaNadiaVandenbroeckDemuynck, StevenStevenDemuynckRomo Negreira, AinhoaAinhoaRomo NegreiraParnell, DoniDoniParnellNafus, KathleenKathleenNafusTahara, ShigeruShigeruTaharaSomervell, MarkMarkSomervell2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23427Progress in directed self-assembly hole shrink applicationsProceedings paper