Dry etch challenges for implantable silicon-based semi-flexible neural probe fabrication

Tutunjyan, NinaNinaTutunjyanAndrei, AlexandruAlexandruAndreiVerbinnen, GreetGreetVerbinnenSlabbekoorn, JohnJohnSlabbekoornEberle, WolfgangWolfgangEberleBaier, UlrichUlrichBaierBoullart, WernerWernerBoullart2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19924Dry etch challenges for implantable silicon-based semi-flexible neural probe fabricationOral presentationwww.pesm2011.be