Lubeck, JaninJaninLubeckSeim, ChristianChristianSeimDehlinger, AurelieAurelieDehlingerHaidl, AndreasAndreasHaidlHoenicke, PhilippPhilippHoenickeKayser, YvesYvesKayserUnterumsberger, RainerRainerUnterumsbergerFleischmann, ClaudiaClaudiaFleischmannBeckhoff, BurkhardBurkhardBeckhoff2021-10-252021-10-2520181431-9276https://imec-publications.be/handle/20.500.12860/31244A compact vibration reduced set-up for scanning nm-XRF and STXMJournal articlehttps://doi.org/10.1017/S1431927618013181