Mechanical response of electrostatic actuators under ESD stress

Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzThijs, StevenStevenThijsVan Hoof, ChrisChrisVan HoofDe Wolf, IngridIngridDe WolfGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16153Mechanical response of electrostatic actuators under ESD stressProceedings paper