Study of wet surface activation routes to enable the deposition of monomolecular organic thin films on k2.0 porous dielectrics

Armini, SilviaSilviaArminiLoyo Prado, JanaJanaLoyo PradoKrishtab, MikhailMikhailKrishtabConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautLe, Quoc ToanQuoc ToanLeVerdonck, PatrickPatrickVerdonckBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220142162-8769https://imec-publications.be/handle/20.500.12860/23503Study of wet surface activation routes to enable the deposition of monomolecular organic thin films on k2.0 porous dielectricsJournal articlehttp://jss.ecsdl.org/content/3/1/N3106.abstract