De Moor, PietPietDe MoorRuythooren, WouterWouterRuythoorenSoussan, PhilippePhilippeSoussanBaert, KrisKrisBaertVan Hoof, ChrisChrisVan HoofSwinnen, BartBartSwinnenBeyne, EricEricBeyne2021-10-162021-10-162007-11https://imec-publications.be/handle/20.500.12860/119633D integration technology developments at IMECProceedings paper