Nagar, MagiMagiNagarStarosvetsky, DavidDavidStarosvetskyVaes, JanJanVaesEin-Eli, YairYairEin-Eli2021-10-182021-10-1820100013-4686https://imec-publications.be/handle/20.500.12860/17678Potassium sorbate as an inhibitor in copper chemical mechanical planarization. Part I. Elucidating slurry chemistryJournal article