Ni-Al alloys as alternative EUV mask absorber

Luong, VuVuLuongPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxOpsomer, KarlKarlOpsomerDetavernier, ChristopheChristopheDetavernierLaubis, ChristianChristianLaubisScholze, FrankFrankScholzeHeyns, MarcMarcHeyns2021-10-252021-10-2520182076-3417https://imec-publications.be/handle/20.500.12860/31249Ni-Al alloys as alternative EUV mask absorberJournal articlehttp://www.mdpi.com/2076-3417/8/4/521