Mankelevich, Y.Y.MankelevichVoronina, E.E.VoroninaRakhimova, T.T.RakhimovaPalov, A.A.PalovLopaev, D.V.D.V.LopaevZyryanov, S.M.S.M.ZyryanovBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-2320160022-3727https://imec-publications.be/handle/20.500.12860/26956Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx filmsJournal articlehttp://iopscience.iop.org/article/10.1088/0022-3727/49/34/345203/meta