Electron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)

Stesmans, AndreAndreStesmansNguyen, A.A.NguyenHoussa, MichelMichelHoussaAfanasiev, ValeriValeriAfanasievTokei, ZsoltZsoltTokeiBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/23121Electron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)Journal articlehttp://www.sciencedirect.com/science/article/pii/S0167931713002955