The use of eDR-71xx for DSA defect review and automated classification

Pathangi Sriraman, HariHariPathangi SriramanVan Den Heuvel, DieterDieterVan Den HeuvelBayana, HareenHareenBayanaBouckou, LoembaLoembaBouckouBrown, JimJimBrownParisi, PaoloPaoloParisiGosain, RohanRohanGosain2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25744The use of eDR-71xx for DSA defect review and automated classificationProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2211015