Electron microscopy techniques for the assessment of localised stress distributions in semiconductors

Vanhellemont, JanJanVanhellemontJanssens, KoenraadKoenraadJanssensFrabboni, S.S.FrabboniBalboni, R.R.BalboniArmigliato, A.A.Armigliato2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/971Electron microscopy techniques for the assessment of localised stress distributions in semiconductorsProceedings paper