Mechanical stability of Cu/low-k BEOL interconnects

Gonzalez, MarioMarioGonzalezVanstreels, KrisKrisVanstreelsCherman, VladimirVladimirChermanCroes, KristofKristofCroesKljucar, LukaLukaKljucarDe Wolf, IngridIngridDe WolfTokei, ZsoltZsoltTokei2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23867Mechanical stability of Cu/low-k BEOL interconnectsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6860606&contentType=Conference+Publications