Modification of BARC layer by UV irradiation for post-etch wet strip applications in BEOL

Kesters, ElsElsKestersLux, MarcelMarcelLuxPittevils, JorisJorisPittevilsVereecke, GuyGuyVereecke2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17362Modification of BARC layer by UV irradiation for post-etch wet strip applications in BEOLMeeting abstract