Integration of PZT ferroelectric capacitors in submicron CMOS processes: results and future challenges

Wouters, DirkDirkWoutersNorga, GerdGerdNorgaBartic, AndreiAndreiBarticFè, LauraLauraFèHaspeslagh, LucLucHaspeslagh2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4033Integration of PZT ferroelectric capacitors in submicron CMOS processes: results and future challengesOral presentation