Veloso, AnabelaAnabelaVelosoHiguchi, YuichiYuichiHiguchiChew, Soon AikSoon AikChewDevriendt, KatiaKatiaDevriendtRagnarsson, Lars-AkeLars-AkeRagnarssonSebaai, FaridFaridSebaaiSchram, TomTomSchramBrus, StephanStephanBrusVecchio, EmmaEmmaVecchioKellens, KristofKristofKellensRohr, ErikaErikaRohrEneman, GeertGeertEnemanSimoen, EddyEddySimoenCho, Moon JuMoon JuChoParaschiv, VasileVasileParaschivCrabbe, YvoYvoCrabbeShi, XiaopingXiaopingShiTielens, HildeHildeTielensVan Ammel, AnnemieAnnemieVan AmmelDekkers, HaroldHaroldDekkersFavia, PaolaPaolaFaviaGeypen, JefJefGeypenBender, HugoHugoBenderPhatak, AnupAnupPhatakdel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua BorniquelXu, K.K.XuAllen, M.M.AllenLiu, C.C.LiuXu, T.T.XuYoo, W.S.W.S.YooThean, AaronAaronTheanHoriguchi, NaotoNaotoHoriguchi2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21767Process control & integration options of RMG Technology for aggressively scaled devicesProceedings paper