Nikolsky, PeterPeterNikolskyDavydova, NataliaNataliaDavydovavan Ingen Schenau, KoenKoenvan Ingen SchenauVan Adrichem, PaulPaulVan AdrichemHendrickx, EricEricHendrickxLorusso, GianGianLorussoJiang, JiongJiongJiangLiu, WeiWeiLiuLiu, HuayuHuayuLiu2021-10-182021-10-182009-09https://imec-publications.be/handle/20.500.12860/15925Feasibility study of the approach to Flare, shadowing, optical and process corrections for EUVL OPCProceedings paper