Titanium silicidation and secondary defect annihilation in ion beam processed SiGe layers

Kyllesbech Larsen, K.K.Kyllesbech LarsenLa Via, F.F.La ViaLombardo, S.S.LombardoRaineri, VitoVitoRaineriAlves Donaton, RicardoRicardoAlves DonatonCampisano, S. U.S. U.Campisano2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1314Titanium silicidation and secondary defect annihilation in ion beam processed SiGe layersProceedings paper