Numerical-experimental comparison of low-g and high-g tests on a polysilicon MEMS accelerometer

Ghisi, A.A.GhisiKalicinski, StanislawStanislawKalicinskiMariani, S.S.MarianiDe Wolf, IngridIngridDe WolfCorigliano, A.A.Corigliano2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13764Numerical-experimental comparison of low-g and high-g tests on a polysilicon MEMS accelerometerProceedings paper