Nanosheet Transistors Produced in 300 mm Fabrication Platform for Quantum Computing

Rohrbacher, ClaudeClaudeRohrbacherLeclerc, DominicDominicLeclercRivard, JoffreyJoffreyRivardRitzenthaler, RomainRomainRitzenthalerLupien, ChristianChristianLupienMertens, HansHansMertensHoriguchi, NaotoNaotoHoriguchiDupont-Ferrier, EvaEvaDupont-Ferrier2025-06-062025-06-062025-JUN0741-3106WOS:001494790500004https://imec-publications.be/handle/20.500.12860/45769Nanosheet Transistors Produced in 300 mm Fabrication Platform for Quantum ComputingJournal article10.1109/LED.2025.3556348WOS:001494790500004THRESHOLDQUBITSNOISEGATE